| 摘要 |
PROBLEM TO BE SOLVED: To improve productivity in laser annealing using a CW laser or a pseudo CW laser, which is inferior compared with that in the case of using an excimer laser. SOLUTION: Laser light is used as a fundamental laser without being transmitted through a nonlinear optical element, and pulse laser light with high intensity and a high repetition frequency is irradiated to a semiconductor thin film, so that laser annealing is performed. Since the nonlinear optical element is not used, and the laser light is not converted into a higher harmonic, a laser oscillator having a large output can be used for a laser annealing method. Accordingly, since the width of a region of crystals having a large grain size formed in a single scan is expanded, productivity is remarkably improved. COPYRIGHT: (C)2006,JPO&NCIPI
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