| 摘要 |
PROBLEM TO BE SOLVED: To make a movable part easily separable from a fixed part in a contact, and to prevent the occurrence of failure. SOLUTION: A micro-actuator is equipped with the fixed part and a beam part 13 which is movably provided relative to that and composed of a thin film. The fixed part comprises a substrate 11, a rising part 15b rising from the substrate 11, and a thin film member 15 formed so as to have a plane part 15a. A fixed electrode 16 is provided on the plane part 15a. The beam part 13 has a movable electrode 14 so as to oppose to the fixed electrode 16. The beam part 13 contacts the plane part 15 by an electrostatic force between the electrodes 14, 16. The height H of the plane part 15a is set to be 3μm or more. COPYRIGHT: (C)2006,JPO&NCIPI
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