发明名称 |
Ultra-fast precision motor with X, Y and Theta motion and ultra-fast optical decoding and absolute position detector |
摘要 |
A high-speed and extremely large range positioning apparatus capable of producing motions in multiple dimensions with high precision and very high reliability. An ultra fast absolute position sensor providing instantaneous position readings with sub nanometer precision on full range of relative positions. A set of optical encoding schemas providing high encoding density and extremely fast decoding regardless of their planar positions. A flexible reshape-able motor with multiple degrees of motions
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申请公布号 |
US7057370(B2) |
申请公布日期 |
2006.06.06 |
申请号 |
US20040710121 |
申请日期 |
2004.06.20 |
申请人 |
TOUZOV IGOR VICTOROVICH |
发明人 |
TOUZOV IGOR VICTOROVICH |
分类号 |
H02K41/02;B64C17/06;H02K11/00;H02K41/03;H03F3/04;H03F3/68 |
主分类号 |
H02K41/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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