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发明名称
均匀控制的蚀刻
摘要
所提出者系一种在晶圆上形成半导体装置之方法。蚀刻层系形成于晶圆上。光阻遮罩系形成于蚀刻层上。移除仅环绕晶圆的外缘之光阻遮罩,以曝露环绕晶圆的外缘之蚀刻层。提供包括含碳及氢分子的沈积气体。电浆系自沈积气体形成。聚合物层系沈积于环绕晶圆的外缘之曝露蚀刻层上,其中聚合物系自沈积气体中的电浆形成。当消耗光阻遮罩及沈积于环绕晶圆的外缘之曝露蚀刻层上的聚合物时,经由光阻遮罩蚀刻蚀刻层。
申请公布号
TW200618115
申请公布日期
2006.06.01
申请号
TW094128974
申请日期
2005.08.24
申请人
泛林股份有限公司
发明人
川口诚二;竹下健二
分类号
H01L21/3205;G03F7/20
主分类号
H01L21/3205
代理机构
代理人
林志刚
主权项
地址
美国
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