| 摘要 |
PROBLEM TO BE SOLVED: To provide a dimension measuring device capable of measuring a measured object with high accuracy. SOLUTION: The dimension measuring device 100 has measuring apparatuses 10, 20 and 30 for measuring a spacer 1 as the measured object. The measuring apparatuses 10, 20 and 30 measure the spacer 1 from different measuring directions on the same plane vertical to the center axis Z of the spacer 1, and acquire measured values as projected dimensions of the spacer 1. The width h and thickness t of the spacer 1 are calculated, based on three acquired measured values. COPYRIGHT: (C)2006,JPO&NCIPI
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