| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe card and a wafer inspection system having the probe card, which make alignment of a sheet-shaped probe with respect to an inspection circuit board, and easily perform an assembly operation. SOLUTION: The probe card comprises: the sheet-shaped probe in which a plurality of contact films in which a plurality of electrode structures are arranged on a flexible insulating film, are placed on the surface of a metallic frame plate having a plurality of openings so that the openings are blocked; the inspection circuit board in which a plurality of inspection electrodes are formed on its surface; a plurality of support members having support pins for supporting the perimeter of the sheet-shaped probe; a position adjustment mechanism for adjusting the position of the sheet-shaped in the planar direction; and an anisotropic conductive connector which is placed so that a plurality of elastic anisotropic conductive films are placed on a frame plate having a plurality of openings which is placed between the inspection circuit board and the sheet-shaped probe so that each opening is blocked. COPYRIGHT: (C)2006,JPO&NCIPI
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