发明名称 SEMICONDUCTOR DEVICE AND ITS EVALUATION CIRCUIT
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device and an evaluation circuit for evaluating the electric potential of a plurality of nodes under measurement by using a single pad for evaluation to solve the problem that a multitude of pads for evaluation are needed for evaluating input/output between function blocks and the output of internally-generated voltage thus increasing a pad area for evaluation, as semiconductor devices are systematized. SOLUTION: This evaluation circuit comprises: the single pad for evaluation; a first inverter circuit using the electric potential of a first node under measurement as a first power source and using the electric potential of a second node under measurement as a second power source; and a second inverter circuit loop-connected to the first inverter circuit. The potential of the first and second nodes can be evaluated while switching between them by initializing the evaluation circuit at a high level or a low level. This makes it possible to reduce the number of pads for evaluation. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006138662(A) 申请公布日期 2006.06.01
申请号 JP20040326424 申请日期 2004.11.10
申请人 ELPIDA MEMORY INC 发明人 MORISHIGE KAZUYUKI
分类号 G01R31/28;H01L21/66;H01L21/822;H01L27/04 主分类号 G01R31/28
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