发明名称 Electrode Structure of a Semiconductor Device.
摘要 1,170,185. Semi-conductor devices. HITACHI Ltd. 16 July, 1968 [28 July, 1967], No. 33868/68. Heading H1K. To ensure a strong bond and good ohmic connection between a semi-conductor member 11 and the refractory metal electrode 14 on its surface, a semi-conductor layer 17 is deposited on this surface from the vapour stage prior to the provision of the metal electrode, this layer being of the same conductivity type as the semiconductor region whereon it is deposited and having a surface impurity concentration of at least 1 x 10<SP>20</SP> atoms per c.c. The metal electrode 14, of molybdenum, chromium, tungsten or titanium is then disposed on this layer, and carries a further metal layer 15 of aluminium on to which a gold connector wire 16 is applied. The semi-conductor member is of silicon and its surfaces are covered with a layer 13 of silicon dioxide. In a further embodiment, Fig. 4, not shown, the semi-conductor member, silicon dioxide layer and refractory metal electrodes are covered with a layer of glass in which holes are provided to allow contact to the electrodes.
申请公布号 GB1170185(A) 申请公布日期 1969.11.12
申请号 GB19680033868 申请日期 1968.07.16
申请人 HITACHI LTD. 发明人
分类号 H01L21/00;H01L23/485;H01L29/00 主分类号 H01L21/00
代理机构 代理人
主权项
地址