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发明名称
A method for drying substrates
摘要
申请公布号
EP0793259(B1)
申请公布日期
2006.05.31
申请号
EP19970103165
申请日期
1997.02.27
申请人
TOKYO ELECTRON LIMITED
发明人
KAMIKAWA, YUJI;UENO, KINYA
分类号
H01L21/00;H01L21/306
主分类号
H01L21/00
代理机构
代理人
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地址
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