发明名称 System, method and apparatus for constant voltage control of RF generator for optimum operation
摘要 A system and method of generating RF includes an RF generator, a variable DC power supply, and a comparator. The RF generator has an RF output coupled to an input of the transducer. The variable DC power supply has a control input and a DC output coupled to the RF generator. The comparator includes a first input coupled to a set point control signal, a second input coupled to the RF generator RF output, and a control signal output coupled to a voltage control input on the variable DC power supply.
申请公布号 US7053000(B2) 申请公布日期 2006.05.30
申请号 US20030359765 申请日期 2003.02.06
申请人 LAM RESEARCH CORPORATION 发明人 ANDERSON THOMAS W.;KNOP ROBERT
分类号 H01L21/302;B06B1/02;B08B3/12;H01L21/00;H01L21/461 主分类号 H01L21/302
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