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发明名称	VACUUM LINE FOR SEMICONDUTOR APPARATUS
摘要
申请公布号	KR20060057060(A)	申请公布日期	2006.05.26
申请号	KR20040096107	申请日期	2004.11.23
申请人	SAMSUNG ELECTRONICS CO., LTD.	发明人	CHA, KIL SEOK;CHOI, YOUNG JIN;SEOL, HYUN SU;JEON, SEONG EOK
分类号	H01L21/02	主分类号	H01L21/02
代理机构		代理人
主权项
地址

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