| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic actuator with little power dissipation, and to provide a method of driving the electrostatic actuator. SOLUTION: The electrostatic actuator includes first and second stator electrodes, in which primary and second substrates face mutually, and a moving member having first and second opposite sides is arranged in between them. In the first and second moving modes, the moving member moves finely between the first and second substrates by a signal voltage from a drive circuit. In a hold mode, in a state with the moving member being held at either the first or the second stator electrode, at least either of stator electrode or either side of the moving member is maintained electrically floating, and are held, as it is. COPYRIGHT: (C)2006,JPO&NCIPI
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