| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an encased abrasive material particle dispersed liquid, remarkably reducing nano-scratch of material to be polished even in polishing after long-term storage independently of the storage period, and also to provide a polishing liquid kit including the encased abrasive material particle dispersed liquid. <P>SOLUTION: In this encased abrasive material particle dispersed liquid, the ratio of contact liquid area of polishing material particle dispersed liquid to the whole area of the wall surface in the case (contact liquid area)/(total wall surface area in the case) is 0.85 or more. This polishing liquid kit is composed of the encased abrasive material particle dispersed liquid, acid and/or its salt. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
