| 摘要 |
PROBLEM TO BE SOLVED: To specify a layer wherein a defect such as foreign matter exists by determining a data distribution on brightness classified by each layer of a multilayered flat inspection object. SOLUTION: A portion to be measured including a defect of the inspection object 2 wherein a defect position is confirmed in a plan view is irradiated with light. While a CCD camera 6 facing to the inspection object 2 is brought close to the inspection object 2, image data in the vertical direction of each layer of the portion to be measured are taken continuously by the CCD camera 6, and the data distribution on the brightness in the vertical direction of each layer of the portion to be measured is determined, based on the image data. The data distribution on the brightness of each layer is compared with a data distribution on the brightness in the vertical direction of each layer of a portion corresponding to the portion to be measured of the inspection object 2 of a reference inspection body determined beforehand, to thereby specify the layer of the inspection object 2 wherein the defect exists. COPYRIGHT: (C)2006,JPO&NCIPI
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