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发明名称
MOLDED ELASTOMER FOR SEMICONDUCTOR PRODUCTION APPARATUS AND CROSSLINKABLE FLUOROELASTOMER COMPOSITION
摘要
申请公布号
EP1253172(A4)
申请公布日期
2006.05.24
申请号
EP20000970245
申请日期
2000.10.31
申请人
DAIKIN INDUSTRIES, LTD.
发明人
HIGASHINO, KATSUHIKO;HASEGAWA, MASANORI;TANAKA, HIROYUKI;NOGUCHI, TSUYOSHI
分类号
C08K3/22;(IPC1-7):C08L101/04;H01L23/29
主分类号
C08K3/22
代理机构
代理人
主权项
地址
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