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发明名称
SPUTTERTARGETS AUF PT-CO-BASIS
摘要
申请公布号
DE60205251(T2)
申请公布日期
2006.05.24
申请号
DE20026005251T
申请日期
2002.04.08
申请人
HERAEUS, INC.
发明人
SANDLIN, MICHAEL;KUNKEL, BERND;ZHANG, WENJUN;CORNO, PHILIP
分类号
B22F1/00;C23C14/34;B22F3/15;C22C19/05;C23C14/14;H01F41/18
主分类号
B22F1/00
代理机构
代理人
主权项
地址
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