Semiconductor memory device for reducing damage to interlevel dielectric layer and fabrication method thereof

摘要

The semiconductor memory device includes an interlevel dielectric pattern and an adhesive pattern, wherein both the interlevel dielectric and adhesive patterns include a contact hole to expose a semiconductor substrate. The adhesive pattern sufficiently adheres a lower electrode of a capacitor to the interlevel dielectric pattern, and thus prevents damage to the interlevel dielectric pattern during the formation of the capacitor. A conductive plug is disposed within the contact hole and may project higher than the top surface of the adhesive pattern. A leakage current preventive pattern is formed on top of the adhesive pattern and prevents a capacitor dielectric layer from directly contacting the plug to prevent occurrences of leakage current. A lower electrode of a capacitor electrically connected to the plug is formed on the plug.