| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a synthetic quartz glass crucible from which a silicon single crystal can be pulled in a high yield without occurrence of liquid surface vibration and a transition generated by an exfoliation of a quartz glass fragment. <P>SOLUTION: The quartz glass crucible for pulling a silicon single crystal has a quartz glass crucible base body comprising an opaque outer layer having a bottom part, a curved part, and a side wall part and an inner layer, which is formed at the inside of the outer layer, having a bottom part, a curved part, and a side wall part. The region with a thickness of 0.5-4.0 mm from the bottom and the inner surface of the side wall of the crucible base body inner layer and the region with a thickness of 0.5-10.0 mm from the inner surface of the curved part of the inner layer of the crucible base body are composed of a synthetic quartz glass, and in the crucible base body inner layer, the region with a thickness of 0.5-2 mm from the inner surface of the inner layer of the crucible base body forms a bubble-containing region in which bubbles with a diameter of 10-100μm are contained by 10-200 pieces/mm<SP>3</SP>in number. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
