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发明名称
Verfahren zum Polieren von mindestens einer Seite eines Silizium enthaltende Werkstücks
摘要
申请公布号
DE60026953(D1)
申请公布日期
2006.05.18
申请号
DE20006026953
申请日期
2000.06.15
申请人
SOCIETE EUROPEENNE DE SYSTEMES OPTIQUES S.E.S.O.,AIX-EN-PROVENCE
发明人
FERME, JEAN-JACQUES;GODEFROY, PHILIPPE;DAHAN, GILBERT
分类号
B08B7/04;B24B37/04;H01L21/304;H01S3/08
主分类号
B08B7/04
代理机构
代理人
主权项
地址
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