| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a mesa type piezoelectric vibrator which prevents the generation of stage cutting of an electrode in a level difference of a thick part and a thin part at a drawing electrode forming time, and which has high reliability in a method of manufacturing a mesa type piezoelectric vibrator of etching a piezoelectric substrate with an electrode pattern used as a protective film. <P>SOLUTION: The method of manufacturing the mesa type piezoelectric vibrator includes a step of forming a metal film on the main surface of the piezoelectric substrate of a parallel flat plate, a step of coating the metal film with a photoresist, a step of forming a predetermined photoresist pattern by exposing and developing the photoresist, a step of forming an electrode pattern by etching the metal film with the photoresist used as the protective film, a step of forming the thin part by etching the piezoelectric substrate with the electrode pattern and the photoresist pattern used as the protective films, and a step of removing the overhanging part of the edge of the electrode pattern by etching with the photoresist pattern used as the protective film. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
