| 摘要 |
PROBLEM TO BE SOLVED: To reduce ripple in a bandwidth. SOLUTION: In a surface acoustic wave element piece 10, a piezoelectric substrate 12 is formed of an X cut board made of lithium tantalate. On the surface of the piezoelectric substrate 12, a pair of IDTs 14 (14a and 14b) consisting of interdigital transducers, and a pair of reflectors 20 (20a and 20b) which sandwich the IDTs in-between are provided. Transducer digit parts 18 (18a and 18b) forming the IDTs 14 have transducer digit main bodies 30 consisting of aluminum-based metal film. On the surface of the transducer digit main bodies 30, anode oxide films 32 formed by anodic oxidation of the transducer digit main bodies 30 are provided. An anode oxidation film 34 is covered with a silicon dioxide film 26. COPYRIGHT: (C)2006,JPO&NCIPI
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