METHOD FOR REMOVING WARPING OF GLASS SURFACE-PLATE

摘要

PROBLEM TO BE SOLVED: To provide a method for relieving efficiently and surely the deformation of a glass platen. SOLUTION: This method for relieving the distortion of a glass platen comprises the steps: piling up a plurality of sheets of glass platens; putting the pile between the heat-resistant flat plates which have the larger size and higher flatness than those of the glass platens, with flat plates similar to the above heat-resistant flat plate inserted each at predetermined number of sheets among the above piled plurality of sheets of glass platens; and heating the glass platens while pressing the both of the most outside heat-resistant flat plates; and then cooling gradually. COPYRIGHT: (C)2006,JPO&NCIPI