| 摘要 |
<P>PROBLEM TO BE SOLVED: To exactly and rapidly detect some anomaly in an adsorbing force of a magnetic adsorber. <P>SOLUTION: This anomaly detector includes a detection coil disposed in a magnetic adsorber so as to detect an adsorbing force of the magnetic adsorber; a detection circuit for processing an output signal of the detection coil and outputting a detection signal corresponding to the adsorbing force; and a signal processing circuit for detecting anomaly in the adsorbing force and generating an anomaly signal on the basis of an output signal of the detection circuit. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
