METHOD FOR PRODUCING VERTICAL NANO-TRANSISTOR,申请号EP20040762682-传众专利搜索

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发明名称	METHOD FOR PRODUCING VERTICAL NANO-TRANSISTOR
摘要
申请公布号	EP1656702(A1)	申请公布日期	2006.05.17
申请号	EP20040762682	申请日期	2004.08.16
申请人	HAHN-MEITNER-INSTITUT BERLIN GMBH	发明人	CHEN, JIE;KOENENKAMP, ROLF
分类号	H01L21/336;H01L29/24;H01L29/423;H01L29/786;(IPC1-7):H01L29/786	主分类号	H01L21/336
代理机构		代理人
主权项
地址

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