Exfoliating method, transferring method of thin film device, thin film integrated circuit device, and liquid crystal display device

摘要

A method for transferring a thin film device on a substrate onto a transfer member, includes: a step for forming a separation layer on the substrate, a step for forming a transferred layer including the thin film device on the separation layer, a step for adhering the transferred layer including the thin film device to the transfer member with an adhesive layer therebetween, a step for irradiating the separation layer with light so as to form internal and/or interfacial exfoliation of the separation layer, and a step for detaching the substrate from the separation layer.