| 摘要 |
<p>1,222,923. Magnesium and zinc aluminates. SIEMENS A.G. 18 June, 1969 [19 June, 1968], No. 30735/69. Heading C1A. [Also in Division H1] Amorphous magnesium-aluminium or zincaluminium spinels are deposited on a monocrystalline Si substrate by pyrolysis of organic vaporizable compounds. To produce an layer suitable organic compounds are aluminium isopropylate or secondary aluminium butylate and magnesium acetylacetonate or, alternatively, vaporized aluminium-magnesium-ethylate may be used. For a zinc-aluminium spinel the zinc-containing compound may be zinc acetylacetonate Nitrogen, argon or a nitrogen-hydrogen or nitrogen-oxygen mixture may be used as a carrier, being charged with the organic reactants at 100-300‹ C. Pyrolysis takes place at 500-600‹ C. Small quantities of TiO 2 may be incorporated into the layer by the addition of tetraethoxy titanium to the pyrolysis mixture. The layer is then heated, preferably at below 950‹ C., to crystallize the spinel layer using the silicon substrate as a nucleus for monocrystalline growth. Subsequently a further layer of Si is epitaxially grown over the spinel layer for use in semi-conductor device manufacture (see Division H1).</p> |
