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发明名称
Apparatus for measuring structure widths
摘要
申请公布号
EP1403676(B1)
申请公布日期
2006.05.03
申请号
EP20030021531
申请日期
2003.09.24
申请人
LEICA MICROSYSTEMS SEMICONDUCTOR GMBH
发明人
CEMIC, FRANZ, DR.;DANNER, LAMBERT
分类号
G01B11/02;G02B21/16;G01B11/00;G01B11/24;G02B3/00;G02B19/00;G03F7/20
主分类号
G01B11/02
代理机构
代理人
主权项
地址
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