发明名称 CLOTH CLEANING DEVICE AND POLISHING MACHINE
摘要 CLOTH CLEANING DEVICE (30) OF A POLISHING MACHINE (10) WHICH IS CAPABLE OF FULLY CLEANING A POLISHING CLOTH (12A) INCLUDING A PART IN THE VICINITY OF A CENTER ROLLER (14). THE CLOTH CLEANING DEVICE (30) INCLUDES AN ARM (22) MOVABLE IN A PLANE PARALLEL TO THE POLISHING CLOTH (12A) BETWEEN A FIRST POSITION ABOVE THE POLISHING CLOTH (12A) AND A SECOND POSITION OUTSIDE OF THE POLISHING CLOTH (12A). A JET NOZZLE (31) IS ATTACHED TO THE ARM (22) AND DIRECTS HIGH PRESSURE WATER (31A) TOWARD THE POLISHING CLOTH (12A). AN ENCLOSING MEMBER (40) ENCLOSES THE JET NOZZLE (31) SO AS TO PREVENT THE HIGH PRESSURE WATER (31A), WHICH HAS BEEN DIRECTED OUT FROM THE JET NOZZLE (31), FROM SCATTERING. THE JET NOZZLE (31) IS ORIENTED TOWARD THE CENTER ROLLER (14) AND THE HIGH PRESSURE WATER (31A) IS DIRECTED TOWARD THE PART OF THE POLISHING CLOTH (12A) IN THE VICINITY OF THE CENTER ROLLER (14) WHEN THE ARM (22) MOVES THE JET NOZZLE (31) CLOSE TO THE CENTER ROLLER (14).
申请公布号 MY122616(A) 申请公布日期 2006.04.29
申请号 MY2000PI05502 申请日期 2000.11.23
申请人 FUJIKOSHI MACHINERY CORP. 发明人 YOSHINOBU NISHIMOTO;MAKOTO NAKAJIMA;YOSHIO NAKAMURA;YASHUHIDE DENDA;CHIHIRO MIYAGAWA
分类号 B24B7/00;B24B53/007;B08B3/02;B24B37/00;B24B37/04;B24B53/017;B24B55/06;H01L21/304 主分类号 B24B7/00
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