发明名称 METAL MASK POSITION ALIGNMENT METHOD AND DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a technique in which positions of respective mask parts are accurately positioned in fixing a metal mask 1 which has arranged a plurality of mask parts 2 having numerous opening parts to a frame in frame-shape. SOLUTION: By holding and pulling respective sides of the metal mask 1 by a plurality of tension units 13, the tension is added to the metal mask 1, and glass scales are overlapped on the lower side of its metal mask 1, and the positions of the respective mask parts 2 are accurately positioned by adjusting the tension given by respective tension units 13 so that the opening parts of the mask parts 2 of a region shown by A, B, C, D of the metal mask 1 become the positions which are correctly overlapped on the reference mark installed at the glass scales. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006114402(A) 申请公布日期 2006.04.27
申请号 JP20040301986 申请日期 2004.10.15
申请人 DAINIPPON PRINTING CO LTD 发明人 TSUCHIYA TERUNAO;SANO TOSHIHIRO
分类号 H05B33/10;C23C14/04;C23C14/24;H01L51/50 主分类号 H05B33/10
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