APPARATUS AND METHODS FOR IMPROVING THE STABILITY OF RF POWER DELIVERY TO A PLASMA LOAD
摘要
<p>Methods for improving the stability of RF power delivery to a plasma load are disclosed. The method includes adding an RF resistor and/or a power attenuator at one of many specific locations in the RF power system to lower the impedance derivatives while keeping the matching circuit substantially in tune with the RF transmission line.</p>
申请公布号
WO2006044722(A2)
申请公布日期
2006.04.27
申请号
WO2005US37125
申请日期
2005.10.12
申请人
LAM RESEARCH CORPORATION;HOWALD, ARTHUR, M;KUTHI, ANDRAS;BAILEY, ANDREW, D, III
发明人
HOWALD, ARTHUR, M;KUTHI, ANDRAS;BAILEY, ANDREW, D, III
