| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface acoustic wave element excellent in withstand power characteristic. SOLUTION: A topside diffusion inhibiting layer 41 and a side diffusion inhibiting layer 42 composed of metal nitride are provided between comb-like electrode parts 23 and 24 of a surface acoustic wave element, and an insulating layer 40. Furthermore, a downside diffusion inhibiting layer 43 composed of metal nitride is provided between the comb-like electrode parts 23 and 24, and a piezoelectric substrate 22. If the diffusion inhibiting layer composed of "metal nitride" is provided between the comb-like electrode parts 23 and 24, and the insulating layer 40, a gap part does occur in the comb-like electrode parts like the prior art even if the insulating layer 40 is formed. Therefore, withstand power characteristic can be improved. COPYRIGHT: (C)2006,JPO&NCIPI
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