| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a slit coater capable of detecting foreign matter possibly coming in contact with the slit nozzle, with high precision. <P>SOLUTION: In the apparatus, a flexible plate 61 is arranged in the forward side, or the +X side, of progressing of the slit nozzle 1, and the backward side, or the -X side, of the plate 61 is irradiated with a laser beam. When there is a to-be-detected target NG, e.g. foreign matter, on a substrate 90 along which the slit nozzle 1 progresses during coating treatment, the target NG comes in contact with the plate 61 before coming in contact with the slit nozzle 1. When the plate 61 comes in contact with the target NG, its contact part is flexed and deformed to move relatively to the -X side, blocking the laser beam. The target NG is detected on the basis of a reduction in the amount of the laser beam received. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
