| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a reflecting film at a low cost which improves its heat resistance and weather resistance, while maintaining high reflection properties of Ag and is less likely to be damaged by scratching. <P>SOLUTION: This reflecting film is formed on a substrate and consists of an Ag alloy film containing 0.1-1.0 atom% Si and 0.1-0.5 atom% Cu with the rest which is made of substantially Ag, and an oxidized silicon film covering the Ag alloy film, and the Ag alloy film is 60 nm thick or larger, and the oxidized silicon film is 50-200 nm thick. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
