| 摘要 |
PROBLEM TO BE SOLVED: To provide a packing container for a substrate which is suitable for packing a large-sized substrate (for example, one side is 500 mm or longer) and can pack a mounted substrate under a good condition and can prevent the substrate from being damaged even when vacuum making and vacuum releasing is performed. SOLUTION: In the packing container for the substrate wherein the substrate 14 is mounted in a mounting space 11 formed in a main body part 12 and a lid part 13, and the substrate 14 is hermetically packed by placing the main body part 12 and the lid part 13 in a bag-like vacuum sheet 26 and vacuumizing it, a ventilation hole 18, a ventilation recessed part 19 and a ventilation channel 20 which give a resistance to the air flow between open air and the mounting space 11 and form an air flow approximately in parallel to the substrate 14 are provided in the main body part 12 and the lid part 13. COPYRIGHT: (C)2006,JPO&NCIPI
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