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发明名称
Verfahren zur Abbildung Halbleiteranordnungen
摘要
申请公布号
DE69830946(T2)
申请公布日期
2006.04.20
申请号
DE19986030946T
申请日期
1998.05.05
申请人
LUCENT TECHNOLOGIES INC., MURRAY HILL
发明人
DENK, WINFRIED;XU, CHUNHUI
分类号
G01R31/302;H01L21/66;G01R31/311;H01L21/027
主分类号
G01R31/302
代理机构
代理人
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地址
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