摘要 |
<P>PROBLEM TO BE SOLVED: To improve the response time of liquid crystal molecules, while keeping the transmittance of pixels and to ensure process margin. <P>SOLUTION: A black matrix 220, a color filter 230 and a common electrode are successively formed on an insulating substrate 210, and insulating substance is layered to form an insulating film thereon. The formed insulating film is exposed, by using a mask and developed to form a pretilt film 310. The mask is constituted, by alternately arranging slits and light shielding films and includes a first region (A), where the width of the light-shielding films is fixed, while the slit width increases from the center to the both side edges, and a second region (B), laid on both sides of the first region (A), where with the width of the slits being fixed, the width of the light-shielding films becomes smaller, the farther the distance is located from the first region. Thereby, the pretilt film 310 in a tapered structure having a uniform inclined surface can be formed, which increases the response time of the liquid crystal and can ensure process margin. <P>COPYRIGHT: (C)2006,JPO&NCIPI |