| 摘要 |
PROBLEM TO BE SOLVED: To provide an electron beam irradiation device capable of obtaining a condition without charging up an electrode surface of an electrostatic deflection apparatus and an electrostatic lens, maintaining highly precise exposure for a long time, and having an anti-oxidation function of the electrode surface for a long period of time. SOLUTION: The electron beam irradiation device having an electron gun generating an electron beam and an electrostatic deflection apparatus controlling the electron beam is such that an electrode surface of a deflection electrode 61 formed on a surface inside a cylindrical electrode base material 60 structuring an electrostatic deflection apparatus is covered with a metal coating 62 as a conductive oxide coating. COPYRIGHT: (C)2006,JPO&NCIPI
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