| 摘要 |
PROBLEM TO BE SOLVED: To obtain a transmission electron microscope allowing anybody to correctly observe an image at a negative electrode tip (filament image) and allowing image observation after axis alignment to be easily restarted. SOLUTION: By projecting a filament image on a fluorescent plate and by adjusting a signal for supplying the shape and position of the projected filament image to deflection coils 12 and 13 for alignment, the filament tip (emitter tip) can be disposed on an optical axis, and the direction of the tip can be set along the optical axis. When the filament image is observed and adjusted, the emission quantity of electrons from the filament 2 must be set to an optimum value. The optimum value is first found in operating the transmission electron microscope, and stored in a memory 11 connected to a computer 9. COPYRIGHT: (C)2006,JPO&NCIPI
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