| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a mold for molding an optical element capable of improving the durability of the mold. SOLUTION: In manufacturing a mold for molding an optical element using a hard carbon film as a mold release layer and an amorphous silicon carbide film as an intermediate layer, direct current pulse bias is applied to the mold when the hard carbon film and the amorphous silicon carbide film are formed. COPYRIGHT: (C)2006,JPO&NCIPI
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