发明名称 Method for making a SOI semiconductor substrate with thin active semiconductor layer
摘要 The invention concerns a method comprising: 1) a first phase including steps which consist in forming in the upper part of a first initial semiconductor substrate a first layer of insulating material above a sectional plane of said first substrate, contacting the first layer of insulating material with the insulating upper part of a second initial substrate, so as to form a single layer of insulating material, a break at the sectional plane, so as to obtain an intermediate semiconductor substrate on the single insulating material layer; then, 2) in a second phase which consists in forming in the intermediate semiconductor substrate an additional insulating material layer adjacent to the single insulating material and topped with an upper layer of a final semiconductor substrate.
申请公布号 US7029991(B2) 申请公布日期 2006.04.18
申请号 US20030312024 申请日期 2003.08.01
申请人 STMICROELECTRONICS S.A. 发明人 LE GOASCOZ VINCENT;JAOUEN HERVE
分类号 H01L21/322;H01L21/265;H01L21/762 主分类号 H01L21/322
代理机构 代理人
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