摘要 |
<P>PROBLEM TO BE SOLVED: To further increase the propagation efficiency of a transmitted ultrasonic wave to an object under test, in an ultrasonic transducer comprising an acoustic matching layer, and to reduce noise resulting from multiple reflection in the ultrasonic transducer. <P>SOLUTION: This acoustic matching layer 14 matches an acoustic impedance between the object under test and a piezoelectric material layer 10 forming a piezoelectric vibrator for transmitting and receiving an ultrasonic wave in the ultrasonic transducer, and is formed by performing film forming by using a plurality of materials having acoustic impedances different from one another, and changing the ratios of mixing of the plurality of materials according to the thickness of deposited films. <P>COPYRIGHT: (C)2006,JPO&NCIPI |