| 摘要 |
<P>PROBLEM TO BE SOLVED: To reduce the effect of air damping without depressurizing the inside of a package, in an angular velocity sensor device in which an angular velocity sensor element of a vibration type provided with a movable part for making driving vibration and detection vibration with the application of an angular velocity is sealed in the package. <P>SOLUTION: In the angular velocity sensor device provided with: the angular velocity sensor element 1 which is provided with the movable parts 31, 33-36, 38, 41, 43-46, and 48 capable of making the driving vibration to a first direction (x) and the detection vibration to a second direction (y) and which detects the angular velocity Ω on the basis of the condition of the detection vibration of the movable part when the angular velocity Ω is applied under the driving vibration of the movable part; and the package 3 for housing the angular velocity sensor element 1, a gas having an effective viscosity coefficient smaller than that of the air is charged into the package at the atmospheric pressure, and the angular velocity sensor element 1 is sealed by the gas. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
