发明名称 TURNING DEVICE FOR HEAVY OBJECT
摘要 PROBLEM TO BE SOLVED: To provide a technique of a compact turning device for a heavy object where the distance between the center of gravity of the heavy object such as a test head and the axis of a turning fulcrum is reduced, and a turning arm and a drive device are constructed so that the length in the axial direction of the turning fulcrum of the heavy object is smaller. SOLUTION: A support base 13 is fixed on a table 3 by a control device 12. An orthogonal axis type speed reducer 6 as a pre-speed reducer is placed in front of a post-speed reducer 26. The output shaft of the orthogonal axis type speed reducer 6 is on the axis A of the planetary gear type speed reducer as the post-speed reducer, and the input shaft of the speed reducer 6 is orthogonal to the axis A. The orthogonal axis type speed reducer 6 is constructed from a hypoid speed reducer, speed reducer with worm gear, and the like. A motor 16 is attached to the lower side of the orthogonal axis type speed reducer 6, with its lower end placed in the table 3. The shaft of the motor 16 is connected to a gear section composed of a hypoid gear, worm wheel, and the like of the orthogonal axis type speed reducer 6. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006098388(A) 申请公布日期 2006.04.13
申请号 JP20050169492 申请日期 2005.06.09
申请人 TOKYO ELECTRON LTD;NABTESCO CORP 发明人 AKIYAMA SHUJI;YAMADA HIROSHI;KAMEDA NOBUHIRO;YUMITATSU TOSHIHIRO
分类号 G01R31/28;G01R31/26;H01L21/66 主分类号 G01R31/28
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