| 摘要 |
PROBLEM TO BE SOLVED: To provide a cleaning device which can remove an organic material for an organic EL attached to a mask. SOLUTION: The cleaning device is provided with first and second cleaning tanks 21, 22 cleaning a mask 10 with a predetermined cleaning solution; first and second rinse tanks 51, 52 rinsing the mask 10 with a predetermined rinse solution at room temperature; and a carrying device 240 holding the mask 10 by a predetermined angle except a horizontal angle so as not to damage a metal thin film of the mask 10 due to stress caused by gravity and carrying the mask 10 held by the predetermined angle to the first and second cleaning tanks 21, 22 and to the first and second rinse tanks 51, 52. Here, the carrying device 240 gets up vertically to hold the mask 10 by the predetermined angle while holding the mask 10 after holding it in a horizontal state at the beginning. COPYRIGHT: (C)2006,JPO&NCIPI
|
