MANUFACTURING METHOD OF PATTERN-FORMING BODY

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of a high-quality pattern-forming body which makes only an objective region accurately liquid-phobic, when forming liquid-philic and liquid-phobic patterns utilizing plasma irradiation.

SOLUTION: The manufacturing method of pattern forming body comprises a plasma irradiation process of making the surface of a light-shielding part liquid-phobic by irradiating a patterning substrate having base material made of inorganic material and the light-shielding part which is formed on the base material and contains at least light-shielding material and resin with plasma, using a fluorine compound as an inlet gas and an impurity removal process of irradiating an opening part, formed dividedly in the light-shielding part with energy and removing impurities on the surface of the opening part formed dividedly in the light-shielding part.

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