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发明名称
SINGLE-CRYSTAL SILICON WAFER HAVING FEW CRYSTAL DEFECTS AND METHOD FOR MANUFACTURING THE SAME
摘要
申请公布号
EP1074643(A4)
申请公布日期
2006.04.12
申请号
EP19990972699
申请日期
1999.11.11
申请人
SHIN-ETSU HANDOTAI CO., LTD
发明人
IIDA, MAKOTO;KIMURA, MASANORI;MURAOKA, SHOZO
分类号
H01L21/208;C30B15/00;C30B15/14;C30B15/20;C30B29/06;(IPC1-7):C30B29/06
主分类号
H01L21/208
代理机构
代理人
主权项
地址
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