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发明名称
Chemically amplified resist compositions
摘要
申请公布号
HK1069440(A1)
申请公布日期
2006.04.07
申请号
HK20050101872
申请日期
2005.03.03
申请人
EVERLIGHT CHEMICAL INDUSTRIAL CORPORATION
发明人
CHI-SHENG CHEN;CHAN-CHAN TSAI;BIN JIAN;HSIN-MING LIAO
分类号
(IPC1-7):G03F
主分类号
(IPC1-7):G03F
代理机构
代理人
主权项
地址
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