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发明名称
Mask having Patterns for Reducing Flare Noise in Semiconductor and Method for Reducing Flare Noise using thereof
摘要
申请公布号
KR100567743(B1)
申请公布日期
2006.04.05
申请号
KR20030101849
申请日期
2003.12.31
申请人
发明人
分类号
H01L21/027
主分类号
H01L21/027
代理机构
代理人
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