| 摘要 |
The invention relates to a collector system for a light source, in particular, a EUV light source, comprising a first collector mirror and a second collector mirror, whereby the first collector mirror reflects the first beam path emitted by the light source into a second beam path leading to the second collector mirror. The first collector mirror is a concave normal-incidence mirror, the aperture angle accepted by the first collector mirror is greater or essentially the same as the second aperture angle, emitted by the first collector mirror and accepted by the second collector mirror. |
