发明名称 APPARATUS AND METHOD FOR HANDLING ELECTRONIC COMPONENTS
摘要 <p><P>PROBLEM TO BE SOLVED: To provide an apparatus and a method for efficiently handling electronic components formed on a common substrate. <P>SOLUTION: In order to handle electronic components (package) 7 formed on the common substrate, the apparatus is provided with a processing unit which comprises a cutting chuck 5 for separating the components, a rinse station, at least one dry station and an output station, a transfer platform for receiving the components from the output station of the processing unit, and an output track for transferring the components to an output position. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p>
申请公布号 JP2006086524(A) 申请公布日期 2006.03.30
申请号 JP20050259758 申请日期 2005.09.07
申请人 ASM ASSEMBLY AUTOMATION LTD 发明人 CHEUNG YIU MING;TSAI PEI WEI;CHEUNG YU SZE
分类号 H01L21/677;H01L21/00;H01L21/301;H01L21/304;H01L21/687 主分类号 H01L21/677
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